1. Key Laboratory of Intelligent Computing and Signal Processing of Ministry of Education School of Integrated Circuits Anhui University Hefei 230601 China
2. Key Lab of Fabrication Technologies for Integrated Circuits Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China
3. University of Chinese Academy of Sciences Beijing 100049 China
4. JFS Laboratory Wuhan Hubei 430206 China
5. State Key Laboratory of High‐Performance Precision Manufacturing Dalian University of Technology Dalian 116024 China
6. Key Laboratory for Micro/Nano Technology and System of Liaoning Province Dalian University of Technology Dalian 116024 China
7. Huadong Photo‐Electron IC Institute Bengbu Anhui 233030 China
8. School for Engineering of Matter Transport and Energy Arizona State University Tempe AZ 85287 USA
9. Frontier Institute of Chip and System State Key Laboratory of Integrated Chips and Systems Zhangjiang Fudan International Innovation Center Fudan University Shanghai 200433 China