1. Laboratory of Process Technology NeptunLab Department of Microsystems Engineering (IMTEK) Albert Ludwig University of Freiburg Georges‐Köhler‐Allee 103 79110 Freiburg Germany
2. Freiburg Materials Research Center (FMF) Albert Ludwig University of Freiburg 79104 Freiburg Germany
3. FIT Freiburg Center of Interactive Materials and Bioinspired Technologies Albert Ludwig University of Freiburg 79085 Freiburg Germany