In situ topography measurement in the SEM-Reference-Cited by-同舟云学术

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In situ topography measurement in the SEM

Published:1992 Issue:2 Volume:14 Page:65-72
ISSN:0161-0457
Container-title:Scanning
language:en
Short-container-title:Scanning

Author:

Thong J. T. L.,Breton B. C.

Funder

Isaac Newton Trust (Cambridge) and Leica Cambridge

Publisher

Wiley

Subject

Instrumentation,Atomic and Molecular Physics, and Optics

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/sca.4950140202/fullpdf

Reference19 articles.

1. Contactless 3-D measuring technique for IC inspection;Breton;Proc SPIE,1987

2. A dynamic real time 3-D measurement technique for IC inspection;Breton;Microelectron Eng,1986

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2. Automated three-dimensional characterization of osteoclastic resorption lacunae by stereoscopic scanning electron microscopy;Journal of Bone and Mineral Research;2009-12-03

3. Evolutionary computation applied to the reconstruction of 3-D surface topography in the SEM;Microscopy;2005-09-29

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5. Quantitative topography measurements of rolled aluminium surfaces by atomic force microscopy and optical methods;Surface and Coatings Technology;1999-01

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