Electron beam testing: Problems in practice-Reference-Cited by-同舟云学术

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Electron beam testing: Problems in practice

Published:1983 Issue:2 Volume:5 Page:71-83
ISSN:0161-0457
Container-title:Scanning
language:en
Short-container-title:Scanning

Author:

Wolfgang E.

Publisher

Wiley

Subject

Instrumentation,Atomic and Molecular Physics, and Optics

Reference29 articles.

1. 1 μm MOSFET VLSI technology: Part VIII-radiation effects;Aitken;IEEE Trans Electron Devices,1979

2. Beall J R SEM electron beam irradiation damage and contamination 1977 121 131

3. Dynamic inspection of large scale integrated circuits;Child;Microelectronics,1976

4. Crichton G Fazekas P Wolfgang E Electron beam testing of microprocessors 444 449 1980

Cited by 21 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Special Techniques in SEM;Springer Series in Optical Sciences;1998

2. In-Line Electrical Test;Microelectronics Manufacturing Diagnostics Handbook;1993

3. Introduction;Electron Beam Testing Technology;1993

4. Electron beam testing versus laser beam testing;Microelectronic Engineering;1992-03

5. Optical beam induced currents in MOS transistors;Microelectronic Engineering;1990-05

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