Author:
Kodama T.,Koyama N.,Uchikawa Y.
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Reference5 articles.
1. Control of charging in low-voltage SEM;Joy;Scanning,1989
2. Electron beam testing of passivated devices via capacitive coupling voltage contrast;Reiners;Scanning Microsc,1988
3. Low voltage SEM inspection of micro electronic devices;Sugiyama;J Electron Microsc,1986
4. Inspection of micro devices over the passivation top-layer surface using the low voltage SEM;Uchikawa;Jpn J Appl Phys,1983
5. Electron trapping in amorphous SiO2 studied by charge buildup under electron bombardment;Vigouroux;J Appl Phys,1985
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献