Author:
Ishibashi Y.,Kodama T.,Oiwa H.,Uchikawa Y.
Funder
Research cooperation between Universities and Industry
Ministry of Education, Science and Culture, Japan
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Reference15 articles.
1. Capacitive coupling voltage contrast;Görlich;Scanning Electron Microsc,1986
2. Control of charging in low-voltage SEM;Joy;Scanning,1989
3. Conditions of energy and incident angle of primary beam for observation of insulator's surface by SEM;Kodama;J Electron Microsc,1992
4. Conditions for voltage contrast observation over passivated devices;Kodama;Scanning,1991
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献