Line profile reconstruction from simultaneously recorded secondary and backscattered electron signals
Author:
Publisher
Wiley
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Reference13 articles.
1. Signal formation of backscattered electrons by microinhomogeneities and surface relief in a SEM;Aristov;Scanning,1991
2. Comparison of the noise of different detection systems using a scintillator-photomultiplier combination;Baumann;Scanning,1981
3. Simple calculation of energy distribution of low-energy secondary electrons emitted from metals under electron bombardment;Chung;J Appl Phys,1974
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Studying the formation of a true-secondary-electron signal in the low-voltage SEM mode;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2017-03
2. Evolutionary computation applied to the reconstruction of 3-D surface topography in the SEM;Microscopy;2005-09-29
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