Objective comparison of scanning ion and scanning electron microscope images
Author:
Affiliation:
1. Instrument Division, Hitachi, Ltd.
2. Techno Research Laboratory, Hitachi Instruments Engineering Co., Ltd., Hitachinaka, Japan
Publisher
Wiley
Subject
Instrumentation,Atomic and Molecular Physics, and Optics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/sca.4950190707
Reference26 articles.
1. Directional effects in kinetic ion-electron emission
2. A Monte Carlo modeling of electron interaction with solids including cascade secondary electron production
3. Ion beam assisted etching and deposition
4. Scanning Electron Microscopy and X-Ray Microanalysis
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