1. High-Frequency High-Voltage Device and Integrated Circuits R&D Center; Institute of Microelectronics; Chinese Academy of Sciences; Beijing 100029 China
2. University of Chinese Academy of Sciences; Beijing 100049 China
3. Key Laboratory of Microelectronics Devices & Integrated Technology; Institute of Microelectronics; Chinese Academy of Sciences; Beijing 100029 China
4. State Key Laboratory of Functional Materials for Informatics; Shanghai Institute of Microsystem and Information Technology; Chinese Academy of Sciences; Shanghai 200050 China