Self-consistent isotopic comparative method used to determine dependence of secondary-ion yields on oxygen concentration in Si-O system up to 33 at%-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Self-consistent isotopic comparative method used to determine dependence of secondary-ion yields on oxygen concentration in Si-O system up to 33 at%

Published:2012-07-15 Issue:1 Volume:45 Page:369-372
ISSN:0142-2421
Container-title:Surface and Interface Analysis
language:en
Short-container-title:Surf. Interface Anal.

Author:

Dupuy J. C.¹,Prudon G.¹,Dubois C.¹,Kögler R.²,Akhmadaliev S.²,Perrat-Mabilon A.³

Affiliation:

1. CNRS & Université de Lyon; INL - INSA 7; avenue J. Capelle; 69621; Villeurbanne; France

2. Helmholtz-Zentrum Dresden-Rossendorf; P.O.B. 51 01; 19-01314; Dresden; Germany

3. CNRS; Institut de Physique Nucléaire de Lyon; la Doua, Bâtiment Paul Dirac 4, Rue Enrico Fermi; 69622; Villeurbanne; France

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference9 articles.

1. Oxygen-concentration dependence of secondary ion yield enhancement

2. Influence of oxygen desorption on in situ analysis of the surface composition during bombardment of Si

3. On the correlation between Si+ yields and surface oxygen concentration using in situ SIMS-LEIS

4. Quantitative study of oxygen enhancement of sputtered ion yields. I. Argon ion bombardment of a silicon surface with O2 flood

5. Quantitative fundamental SIMS studies using 18O implant standards

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP