Influence of oxygen desorption on in situ analysis of the surface composition during bombardment of Si
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference24 articles.
1. Quantitative study of oxygen enhancement of sputtered ion yields. I. Argon ion bombardment of a silicon surface with O2 flood
2. Model for the emission ofSi+ions during oxygen bombardment of Si(100) surfaces
3. Bond Breaking and the Ionization of Sputtered Atoms
4. Chemical enhancement effects in SIMS analysis
5. Anomalous enhancement of negative sputtered ion emission by oxygen
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