1. Christian Doppler Laboratory for Single‐Defect Spectroscopy at the Institute for Microelectronics TU Wien, Gusshausstrasse 27‐29 Vienna 1040 Austria
2. Institute for Microelectronics TU Wien, Gusshausstrasse 27‐29 Vienna 1040 Austria
3. Ioffe Institute Polytechnicheskaya 26 St‐Petersburg 194021 Russia
4. imec Kapeldreef 75 Leuven 3001 Belgium