High Resolution Patterning of an Organic–Inorganic Photoresin for the Fabrication of Platinum Microstructures-Reference-Cited by-同舟云学术

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High Resolution Patterning of an Organic–Inorganic Photoresin for the Fabrication of Platinum Microstructures

Published:2021-08 Issue:37 Volume:33 Page:2101992
ISSN:0935-9648
Container-title:Advanced Materials
language:en
Short-container-title:Advanced Materials

Author:

Luitz Manuel¹,Lunzer Markus²,Goralczyk Andreas¹,Mader Markus¹,Bhagwat Sagar¹,Warmbold Andreas³,Helmer Dorothea¹³⁴,Kotz Frederik¹³^ORCID,Rapp Bastian E.¹³⁴^ORCID

Affiliation:

1. Laboratory of Process Technology NeptunLab Department of Microsystems Engineering (IMTEK) University of Freiburg Georges‐Köhler‐Allee 103 79110 Freiburg Germany

2. UpNano GmbH Modecenterstraße 22/D6 Vienna 1030 Austria

3. Freiburg Materials Research Center (FMF) University of Freiburg Stefan‐Meier‐Straße 21 79104 Freiburg Germany

4. FIT Freiburg Center of Interactive Materials and Bioinspired Technologies University of Freiburg Georges‐Köhler‐Allee 105 79110 Freiburg Germany

Funder

European Research Council

Deutsche Forschungsgemeinschaft

Carl-Zeiss-Stiftung

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adma.202101992

Reference58 articles.

1. MEMS thermal flow sensors

2. Design and applications of MEMS flow sensors: A review

3. A microfluidic chip for electrochemical conversions in drug metabolism studies

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