1. State Key Laboratory of Silicon Materials School of Materials Science and Engineering Zhejiang University Hangzhou 310027 China
2. Research Center for Intelligent Sensing Zhejiang Lab Hangzhou 311100 China
3. Research Center for Sensing Materials and Devices Zhejiang Lab Hangzhou 311121 China
4. Shenyang National Laboratory for Materials Science Institute of Metal Research Chinese Academy of Sciences Shenyang 110016 China
5. Department of Materials Science and Engineering Massachusetts Institute of Technology Cambridge MA 02139 USA
6. Research Laboratory of Electronics Massachusetts Institute of Technology Cambridge MA 02139 USA
7. Center of Electron Microscopy School of Materials Science and Engineering Zhejiang University Hangzhou 310027 China
8. School of Physics and Microelectronics Zhengzhou University Zhengzhou 450052 China