1. State Key Laboratory of Silicon and Advanced Semiconductor Materials International Research Center for X Polymers Department of Polymer Science and Engineering Zhejiang University Hangzhou 310027 P. R. China
2. Institute of Advanced Semiconductor Research ZJU‐Hangzhou Global Scientific and Technological Innovation Center Hangzhou 310022 P. R. China
3. CAS Center for Excellence in NanoscienceSuzhou Institute of Nano‐Tech and Nano‐Bionics (SINANO) Chinese Academy of Science Suzhou 215123 P. R. China
4. Interdisciplinary Center for Quantum Information and Zhejiang Province Key Laboratory of Quantum Technology and Device Department of Physics Zhejiang University Hangzhou 310027 P. R. China
5. School of Engineering Westlake University Hangzhou 310024 P. R. China