A feasibility study of ZnO-based FBAR devices for an ultra-mass-sensitive sensor application-Reference-Cited by-同舟云学术

A feasibility study of ZnO-based FBAR devices for an ultra-mass-sensitive sensor application

Published:2004 Issue:6 Volume:42 Page:505-507
ISSN:0895-2477
Container-title:Microwave and Optical Technology Letters
language:en
Short-container-title:Microw. Opt. Technol. Lett.

Author:

Mai Linh,Kim Dong-Hyun,Yim Munhyuk,Yoon Giwan

Publisher

Wiley

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference5 articles.

1. and Vapor and liquid mass sensing by micromachined acoustic resonator, IEEE Micro Electro Mechanical Systems Int Conf MEMS' 03 Kyoto, 2003, pp 470-473.

2. Fabrication of ZnO-based film bulk acoustic resonator devices using W/SiO2 multilayer reflector

3. Improvements of resonance characteristics due to thermal annealing of Bragg reflectors in ZnO-based FBAR devices

4. Verwendung von Schwingquarzen zur W�gung d�nner Schichten und zur Mikrow�gung

5. Acoustic fields and waves in solids, Kreiger Publishing, Malabar, FL, 1990, pp 376-379.

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