Lithographic micropatterning on the β‐PVDF film using reactive ion etching aim for high‐resolution skin sensors
Author:
Affiliation:
1. Department of Systems EngineeringWakayama University 930 Sakaedani Wakayama 640‐8510 Japan
2. Graduate School of Systems EngineeringWakayama University 930 Sakaedani Wakayama 640‐8510 Japan
Publisher
Wiley
Subject
Electrical and Electronic Engineering
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/tee.22978
Reference5 articles.
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3. State-of-the-Art in Force and Tactile Sensing for Minimally Invasive Surgery
4. Microstructure fabrication on a β-phase PVDF film by wet and dry etching technology
5. Fabrication of microstructure array directly onβ-phase poly(vinylidene fluoride) thin film by O2reactive ion etching
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