Extremely low surface recombination velocities on low-resistivityn-type andp-type crystalline silicon using dynamically deposited remote plasma silicon nitride films

Author:

Duttagupta Shubham12,Lin Fen1,Wilson Marshall3,Boreland Matthew B.1,Hoex Bram1,Aberle Armin G.12

Affiliation:

1. Solar Energy Research Institute of Singapore; National University of Singapore; Singapore

2. Department of Electrical and Computer Engineering; National University of Singapore; Singapore

3. Semilab SDI LLC; Tampa FL USA

Publisher

Wiley

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference38 articles.

1. Surface passivation of crystalline silicon solar cells: a review;Aberle;Progress in Photovoltaics,2000

2. Optimised antireflection coatings for planar silicon solar cells using remote PECVD silicon nitride and porous silicon dioxide;Nagel;Progress in Photovoltaics,1999

3. Cuevas A Kerr MJ Schmidt J Passivation of crystalline silicon using silicon nitride Proceedings of 3rd World Conference on Photovoltaic Energy Conversion 2003 913 918

4. Defect passivation of industrial multicrystalline solar cells based on PECVD silicon nitride;Duerinckx;Solar Energy Materials and Solar Cells,2002

5. Recombination at the interface between silicon and stoichiometric plasma silicon nitride;Kerr;Semiconductor Science and Technology,2002

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