21.3: A Novel 5-Mask Etch-Stopper Pixel Structure with A Short Channel Oxide Semiconductor TFT
Author:
Affiliation:
1. LG Display R&D Center,1007, Paju-si, Gyounggi-do, KOREA
2. Optoelectronics Lab., Dept. of Electrical Engineering, Korea Univ., Seoul, KOREA
Publisher
Wiley
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Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. 3 μm a‐Si TFT Technology for High‐Performance and Cost‐Effective Liquid Crystal Displays;SID Symposium Digest of Technical Papers;2020-07
2. Enhancement of a-IGZO TFT Device Performance Using a Clean Interface Process via Etch-Stopper Nano-layers;Nanoscale Research Letters;2018-05-29
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