Theoretical and experimental investigation of on‐chip silicon‐on‐insulator waveguide methane sensor

Abstract

AbstractCompared to discrete gas sensors, on‐chip waveguide gas sensors show a wide range of application scenarios due to their small size, light weight, and low power consumption. An on‐chip silicon‐on‐insulator waveguide methane (CH4) sensor was proposed. The optimal waveguide length was determined to be 2.2 cm through theoretical analysis. By targeting an absorption line located at 3291 nm, on‐chip methane measurements were conducted using the established waveguide sensor system. The 1σ limit of detection of the waveguide sensor was measured to be 662 parts‐per‐million and the dynamic response time was 1.6 s. This work verifies the feasibility of the waveguide gas sensor and provides technical support for future research work on fully integrated waveguide sensors.