In Situ Mitigation of Subsurface and Peripheral Focused Ion Beam Damage via Simultaneous Pulsed Laser Heating-Reference-Cited by-同舟云学术

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In Situ Mitigation of Subsurface and Peripheral Focused Ion Beam Damage via Simultaneous Pulsed Laser Heating

Published:2016-02-10 Issue:13 Volume:12 Page:1779-1787
ISSN:1613-6810
Container-title:Small
language:en
Short-container-title:Small

Author:

Stanford Michael G.¹,Lewis Brett B.¹,Iberi Vighter²,Fowlkes Jason D.¹²,Tan Shida³,Livengood Rick³,Rack Philip D.¹²

Affiliation:

1. Materials Science and Engineering Department; University of Tennessee; Knoxville TN 37996 USA

2. Nanofabrication Research Laboratory; Center for Nanophase Materials Sciences; Oak Ridge National Laboratory; Oak Ridge TN 37381 USA

3. Intel Corporation Santa Clara, MS: SC9-68, 2200 Mission College Blvd; CA 95054 USA

Publisher

Wiley

Subject

Biomaterials,Biotechnology,General Materials Science,General Chemistry

Reference32 articles.

1. Gas-assisted focused electron beam and ion beam processing and fabrication

2. Nanofabrication with a helium ion microscope

3. Nanopatterning and Electrical Tuning of MoS2 Layers with a Subnanometer Helium Ion Beam

4. Helium ion microscopy of graphene: beam damage, image quality and edge contrast

5. Maskless Lithography and in situ Visualization of Conductivity of Graphene using Helium Ion Microscopy

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3. Experimental study on the thermal evolution of silicon defects with zonal characteristics induced by precisely localized irradiation of focused helium ion beams;Vacuum;2023-12

4. A Boltzmann Transport Equation Model for Substrate Damage During Focused Helium Ion Beam Fabrication of Nanostructures;2023 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD);2023-09-27

5. Fabricating Solid-State Nanopores for Single-Molecule Sensing;Solid State Nanopores;2023

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