Thin-Film PECVD (AKT)

Author:

Won Tae Kyung1,Choi Soo Young1,White John M.1

Affiliation:

1. Applied Materials; Santa Clara CA 95054 USA

Publisher

John Wiley & Sons Ltd

Reference19 articles.

1. Large area PECVD technology;Choi;ECS Trans.,2009

2. The latest plasma-enhanced chemical-vapor deposition technology for large-size processing;Yang;IEEE J. of Display Tech.,2007

3. PECVD tool productivity enhancement with remote plasma source;Shang;Proceedings of Display Manufacture Technology conference,1998

4. Novel integration process for IGZO MO-TFT fabrication on Gen 8.5 PECVD and PVD systems a quest to improve TFT stability and mobility;Park;ECS Transactions,2013

5. Thin film processing by radio frequency hollow cathodes;Bardos;Surface and Coatings Technology,1997

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