Dielectrophoresis-Assisted Integration of 1024 Carbon Nanotube Sensors into a CMOS Microsystem
Author:
Affiliation:
1. RIKEN QBiC; 650-0047 Kobe Japan
2. ETH Zurich; Department of Biosystems Science and Engineering; 4058 Basel Switzerland
Funder
Japan Society for the Promotion of Science
Eidgenössische Technische Hochschule Zürich
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
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