1. Key Laboratory of Microelectronic Devices & Integrated Technology Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China
2. Department of Physics Hubei Nuclear Solid Physics Key Laboratory and Center for Ion beam Application Wuhan University Wuhan 430072 China
3. State Key Laboratory of Functional Materials for Informatics Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences Shanghai 200050 China
4. School of Electronic, Electrical and Communication Engineering University of Chinese Academy of Sciences Beijing 100049 China
5. Jiangsu National Synergetic Innovation Center for Advanced Materials (SICAM) Nanjing 210009 China
6. Department of Nuclear Engineering Texas A&M University College Station TX 77843 USA
7. Materials Science and Technology Division Los Alamos National Laboratory Los Alamos NM 87545 USA