Approaching Gas Phase Electrodeposition: Process and Optimization to Enable the Self-Aligned Growth of 3D Nanobridge-Based Interconnects-Reference-Cited by-同舟云学术

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Approaching Gas Phase Electrodeposition: Process and Optimization to Enable the Self-Aligned Growth of 3D Nanobridge-Based Interconnects

Published:2015-12-21 Issue:9 Volume:28 Page:1770-1779
ISSN:0935-9648
Container-title:Advanced Materials
language:en
Short-container-title:Adv. Mater.

Author:

Fang Jun¹,Schlag Leslie²,Park Se-Chul¹,Stauden Thomas²,Pezoldt Jörg²,Schaaf Peter³,Jacobs Heiko O.²

Affiliation:

1. Electrical and Computer Engineering; University of Minnesota; 200 Union St. SE Minneapolis MN 55455 USA

2. Fachgebiet Nanotechnologie; Technische Universität Ilmenau; Gustav-Kirchhoff-Strasse 1 D-98693 Ilmenau Germany

3. Fachgebiet Werkstoffe der Elektrotechnik; Technische Universität Ilmenau; Gustav-Kirchhoff-Strasse 5 D-98693 Ilmenau Germany

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference25 articles.

1. The Ultrasonic Welding Mechanism as Applied to Aluminum-and Gold-Wire Bonding in Microelectronics

2. Development of copper wire bonding application technology

3. Unconventional applications of wire bonding create opportunities for microsystem integration

4. The future of interconnection technology

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Novel Gas Phase Route Toward Patterned Deposition of Sputter‐Free Pt/Al Nanofoils;Advanced Materials Technologies;2023-07-08

2. Self‐Aligning Metallic Vertical Interconnect Access Formation through Microlensing Gas Phase Electrodeposition controlling Airgap and Morphology;Advanced Electronic Materials;2022-10-17

3. Silk fibroin-decorated with tunable Au/Ag nanodendrites: A plastic near-infrared SERS substrate with periodic microstructures for ultra-sensitive monitoring of lactic acid in human sweat;Vibrational Spectroscopy;2022-01

4. Three-dimensional platinum nanoparticle-based bridges for ammonia gas sensing;Scientific Reports;2021-06-15

5. Recent developments in nanotechnology-based printing electrode systems for electrochemical sensors;Talanta;2021-04

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