1. Karlsruhe Institute of Technology; Light Technology Institute; Engesser Str. 13 76131 Karlsruhe Germany
2. InnovationLab; Speyererstr. 4 69115 Heidelberg Germany
3. Karlsruhe Institute of Technology; Institute of Thermal Process Engineering; Thin Film Technology; Kaiserstr. 12 76131 Karlsruhe Germany
4. Institute of Microstructure Technology; Karlsruhe Institute of Technology; Hermann-von-Helmholtz-Platz 1 76344 Eggenstein-Leopoldshafen Germany