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Coherent X-Ray Diffraction Imaging and Characterization of Strain in Silicon-on-Insulator Nanostructures

  • Published:2014-06-23 Issue:46 Volume:26 Page:7747-7763
  • ISSN:0935-9648
  • Container-title:Advanced Materials
  • language:en
  • Short-container-title:Adv. Mater.

Author:

Xiong Gang1,Moutanabbir Oussama2,Reiche Manfred3,Harder Ross4,Robinson Ian1

Affiliation:

1. London Centre for Nanotechnology; University College London; London WC1H 0AH United Kingdom

2. Department of Engineering Physics; Ecole Polytechnique de Montreal; Montreal Quebec H3C 3A7 Canada

3. Max Planck Institute of Microstructure Physics; Weinberg 2 06120 Halle (Saale) Germany

4. Advanced Photon Source; Argonne National Laboratory; Argonne Illinois 60439 USA

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

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