Programmable Mechanical Resonances in MEMS by Localized Joule Heating of Phase Change Materials
Author:
Affiliation:
1. CNR-SPIN, Corso Perrone 24; Genova 16152 Italy
2. Physics Department; University of Genova; Via Dodecaneso 33 Genova 16146 Italy
3. Institute of Scientific and Industrial Research; Osaka University; Mihogaoka Ibaraki 8-1 Osaka 567-0047 Japan
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
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