Robust control and data-driven tuning of a hybrid integrator-gain system with applications to wafer scanners
Author:
Affiliation:
1. Department of Mechanical Engineering; Eindhoven University of Technology; Eindhoven The Netherlands
2. Mechatronic Systems Design Department; ASML; Veldhoven The Netherlands
Publisher
Wiley
Subject
Electrical and Electronic Engineering,Signal Processing,Control and Systems Engineering
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/acs.2888/fullpdf
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