1. State Key Laboratory for Manufacturing Systems Engineering Electronic Materials Research Laboratory, Key Laboratory of the Ministry of Education & International Center for Dielectric Research School of Electronic Science and Engineering Xi'an Jiaotong University Xi'an the People's Republic of China
2. School of Integrated Circuits Peking University Beijing the People's Republic of China
3. Beijing Microelectronics Technology Institute Beijing the People's Republic of China
4. National Key Laboratory of Human‐Machine Hybrid Augmented Intelligence, National Engineering Research Center for Visual information and Applications, and School of Software Xi'an Jiaotong University Xi'an the People's Republic of China
5. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences Shanghai the People's Republic of China
6. Key Laboratory of Microelectronics Device and Integrated Technology, The Institute of Microelectronics of Chinese Academy of Sciences Beijing the People's Republic of China
7. University of Chinese Academy of Sciences Beijing the People's Republic of China
8. The State Key Laboratory for Manufacturing Systems Engineering & The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology Xi'an Jiaotong University Xi'an the People's Republic of China
9. Leibniz‐Institut für Kristallzüchtung, Max‐Born‐Straße 2 Berlin Germany
10. Key Laboratory of Physical Electronics and Devices, Ministry of Education, School of Electronic Science and Engineering Xi'an Jiaotong University Xi'an the People's Republic of China
11. The International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology Xi'an Jiaotong University Xi'an the People's Republic of China