Siloxane Copolymers for Nanoimprint Lithography
Author:
Publisher
Wiley
Subject
Electrochemistry,Condensed Matter Physics,Biomaterials,Electronic, Optical and Magnetic Materials
Reference21 articles.
1. Imprint of sub‐25 nm vias and trenches in polymers
2. Imprint Lithography with 25-Nanometer Resolution
3. Sub-10 nm imprint lithography and applications
4. Recent progress in nanoimprint technology and its applications
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