Author:
Trujillo Nathan J.,Wu Qingguo,Gleason Karen K.
Subject
Electrochemistry,Condensed Matter Physics,Biomaterials,Electronic, Optical and Magnetic Materials
Reference50 articles.
1. Low Dielectric Constant Materials for ULSI Interconnects
2. The 1.7 Kilogram Microchip: Energy and Material Use in the Production of Semiconductor Devices
3. ITRS2007 International Technology Roadmap for Semiconductors, Interconnects & Environmental Health and Safety, 2007.
4. ITRS2006 International Technology Roadmap for Semiconductors, Interconnects & Environmental Health and Safety, 2006.
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