Initiated Chemical Vapor Deposition of Polymer Films at High Process Temperature for the Fabrication of Organic/Inorganic Multilayer Thin Film Encapsulation
Author:
Affiliation:
1. Department of Chemical & Biomolecular Engineering; Korea Advanced Institute of Science and Technology; 291 Daehak-ro Yuseong-gu Daejeon, 34141 Korea
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science
Reference25 articles.
1. Mechanisms of vapor permeation through multilayer barrier films: Lag time versus equilibrium permeation
2. A monolithic integration of robust, water-/oil-repellent layer onto multilayer encapsulation films for organic electronic devices
3. Organic/inorganic multilayer thin film encapsulation via initiated chemical vapor deposition and atomic layer deposition for its application to organic solar cells
4. Initiated and Oxidative Chemical Vapor Deposition of Polymeric Thin Films: iCVD and oCVD
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