Substrate Independent Elastic Modulus of Thin Low Dielectric Constant Materials
Author:
Affiliation:
1. Department of Materials Engineering; KU Leuven; B-3000 Leuven Belgium
2. imec; Kapeldreef 75, B-3001 Leuven; Belgium
3. Hysitron Inc.; Dennewartstrasse 25, 52068 Aachen; Germany
4. Hysitron Inc.; Minneapolis Minnesota USA
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/adem.201600653/fullpdf
Reference26 articles.
1. C. S. Pai P. W. Diodato R . Liu Proc. IEEE 1998 Int. Interconnect Technology Conf San Francisco, CA 1998 244
2. Low dielectric constant materials for microelectronics
3. Porous Dielectrics in Microelectronic Wiring Applications
4. Mechanical Stability of Porous Low-k Dielectrics
5. Effect of Pore Structure of Nanometer Scale Porous Films on the Measured Elastic Modulus
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