Optical and Mechanical Characterization of Sputtered AlN/Ag Multilayer Films-Reference-Cited by-同舟云学术

Optical and Mechanical Characterization of Sputtered AlN/Ag Multilayer Films

Published:2019-03-15 Issue:5 Volume:21 Page:1801268
ISSN:1438-1656
Container-title:Advanced Engineering Materials
language:en
Short-container-title:Adv. Eng. Mater.

Author:

Appleget Chelsea D.¹,Hodge Andrea M.¹

Affiliation:

1. Department of Aerospace and Mechanical EngineeringMork Family Department of Chemical Engineering and Materials ScienceUniversity of Southern CaliforniaLos AngelesCA90089USA

Funder

Office of Naval Research

Publisher

Wiley

Subject

Condensed Matter Physics,General Materials Science

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adem.201801268

Reference66 articles.

1. Multilayer mirror with enhanced spectral selectivity for the next generation extreme ultraviolet lithography

2. Effects of interface roughness on the spectral properties of thin films and multilayers

3. Highly transparent and infrared reflective AZO/Ag/AZO multilayer film prepared on PET substrate by RF magnetron sputtering

4. High quality transparent TiO2/Ag/TiO2 composite electrode films deposited on flexible substrate at room temperature by sputtering

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