Assessment of fire protection performance of water mist applied in exhaust ducts for semiconductor fabrication process-Reference-Cited by-同舟云学术

Assessment of fire protection performance of water mist applied in exhaust ducts for semiconductor fabrication process

Published:2005 Issue:5 Volume:29 Page:295-302
ISSN:0308-0501
Container-title:Fire and Materials
language:en
Short-container-title:Fire Mater.

Author:

Shu Yi-Liang,Jeng Wei-Jin,Chiu Chen-Wei,Chen Chiun-Hsun

Publisher

Wiley

Subject

Metals and Alloys,Polymers and Plastics,General Chemistry,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Chemical hazards in the semiconductor industry

2. Accidental explosions of semiconductor manufacturing gases in Japan

3. Characteristics of fire and explosion in semiconductor fabrication processes

4. NFPA 318 (2002 edition). Standard for the Protection of Semiconductor Fabrication Facilities. National Fire Protection Association: Dallas, TX, 2002.

5. FM Global Loss Prevention Data sheet 7-7. Semiconductor Fabrication Facilities, Factory Mutual Research Corporation, Norwood, MA, USA. 2003.

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