Subject
Safety, Risk, Reliability and Quality,General Chemical Engineering
Reference12 articles.
1. and , ULSI Technology, McGraw-Hill, New York, NY, 1996.
2. FMRC Data Sheet 7-7/17-12, Semiconductor Fabrication Facilities, January 1997.
3. Delatech Co., Controlled Decomposition/Oxidation (CDO) System 859, 1997.
4. Experimental study on flammability limit of a chlorine trifuloride/dichlorosilane/nitrogen mixture
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