Cesium retention during sputtering with low energy Cs+ and oxygen flooding
Author:
Publisher
Wiley
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/sia.3676/fullpdf
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1. The fate of the (reactive) primary ion: Sputtering and desorption
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5. Advanced secondary ion mass spectroscopy quantification in the first few nanometer of B, P, and As ultrashallow implants
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1. Determining the oxygen detection limit with magnetic sector dynamic secondary ion mass spectrometry (SIMS);Journal of Vacuum Science & Technology B;2023-06-29
2. Temperature dependent Cs retention, distribution, and ion yield changes during Cs+ bombardment SIMS;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-05
3. Temperature dependent relocation of the cesium primary ion beam during SIMS analysis;Surface and Interface Analysis;2014-08-07
4. The secondary ions emission from Si under low-energy Cs bombardment in a presence of oxygen;Surface and Interface Analysis;2012-08-05
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