Thin-film characterization by x-ray fluorescence
Author:
Publisher
Wiley
Subject
Spectroscopy
Reference12 articles.
1. Calculation methods for fluorescent x-ray spectrometry. Empirical coefficients versus fundamental parameters
2. Simultaneous determination of composition and mass thickness of thin films by quantitative x-ray fluorescence analysis
3. Quantitative X-ray fluorescence analysis of thin films using LAMA-2
4. Lama III — A Computer Program for Quantitative XRFA of Bulk Specimens and Thin Film Layers
5. Characterization of Thin Films by X-Ray Fluorescence and Diffraction Analysis
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3. Applicability of X-ray fluorescence spectroscopy as method to determine thickness and composition of stacks of metal thin films: A comparison with imaging and profilometry;Thin Solid Films;2012-01
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