Measurement of composition of thin films obtained by sputtering using radioisotope excited X-ray fluorescence
Author:
Publisher
Wiley
Subject
Spectroscopy
Reference18 articles.
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2. and Backscattering Spectrometry, Chapt. 6. Academic Press, New York (1978).
3. Simultaneous determination of composition and mass thickness of thin films by quantitative x-ray fluorescence analysis
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5. Application of SR-XFA for identification of the basic composition of high-temperature superconductors
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