Factors affecting the sensitivity of positive electron resists-Reference-Cited by-同舟云学术

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Factors affecting the sensitivity of positive electron resists

Published:2007-03-08 Issue:1 Volume:49 Page:221-226
ISSN:0360-8905
Container-title:Journal of Polymer Science: Polymer Symposia
language:en
Short-container-title:J. polym. sci., C Polym. symp.

Author:

Bowden M. J.

Publisher

Wiley

Subject

General Engineering

Reference13 articles.

1. G. R. Brewer Proc. 4th Internat. Conf. Electron and Ion Beam Science and Technology 1970 455

2. Electron Beam Fabrication of Micron Transistors

3. A New Family of Positive Electron Beam Resists—Poly(Olefin Sulfones)

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4. Radiation Chemistry of Polymers;Encyclopedia of Polymer Science and Technology;2004-10-15

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