1. Department of Microsystems Engineering (IMTEK) University of Freiburg Georges‐Köhler‐Allee 105 Freiburg 79110 Germany
2. Freiburg Center for Interactive Materials and Bioinspired Technologies (FIT) University of Freiburg Georges‐Köhler‐Allee 105 Freiburg 79110 Germany
3. Department of Materials Science and Engineering Universität des Saarlandes Campus Saarbrücken 66123 Germany