Filling of Nanometric Pores with Polymer by Initiated Chemical Vapor Deposition-Reference-Cited by-同舟云学术

Filling of Nanometric Pores with Polymer by Initiated Chemical Vapor Deposition

Published:2020-06-09 Issue:14 Volume:41 Page:2000200
ISSN:1022-1336
Container-title:Macromolecular Rapid Communications
language:en
Short-container-title:Macromol. Rapid Commun.

Author:

Van‐Straaten Manon¹²,Ben Hadj Mabrouk Amal¹,Veillerot Marc¹,Licitra Christophe¹,D’Agosto Franck²,Jousseaume Vincent¹^ORCID

Affiliation:

1. Université Grenoble Alpes CEA, LETI Grenoble F‐38000 France

2. Université de Lyon Univ Lyon 1 CPE Lyon CNRS, UMR 5265, C2P2 (Chemistry, Catalysis, Polymers, and Processes) Team LCPP Bat 308F, 43 Bd du 11 Novembre 1918 Villeurbanne F‐69616 France

Publisher

Wiley

Subject

Materials Chemistry,Polymers and Plastics,Organic Chemistry

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/marc.202000200

Reference40 articles.

1. Ordered porous materials for emerging applications

2. PECVD low and ultralow dielectric constant materials: From invention and research to products

3. Advanced Interconnects for ULSI Technology

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