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The link between nanoscale feature development in a negative resist and the Hansen solubility sphere

  • Published:2009-09-23 Issue:21 Volume:47 Page:2091-2105
  • ISSN:0887-6266
  • Container-title:Journal of Polymer Science Part B: Polymer Physics
  • language:en
  • Short-container-title:J. Polym. Sci. B Polym. Phys.

Author:

Olynick Deirdre L.,Ashby Paul D.,Lewis Mark D.,Jen Timothy,Lu Haoren,Liddle J. Alexander,Chao Weilun

Funder

Director, Office of Science, Office of Basic Energy Sciences, Materials Sciences and Engineering Division, of the U.S. Department of Energy

Publisher

Wiley

Subject

Materials Chemistry,Polymers and Plastics,Physical and Theoretical Chemistry,Condensed Matter Physics

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