Development of Removable Hollow Cathode Discharge Apparatus for Sputtering Solid Metals-Reference-Cited by-同舟云学术

Development of Removable Hollow Cathode Discharge Apparatus for Sputtering Solid Metals

Published:2019-04-17 Issue: Volume:2019 Page:1-6
ISSN:2314-4920
Container-title:Journal of Spectroscopy
language:en
Short-container-title:Journal of Spectroscopy

Author:

Ishikawa Daisuke¹^ORCID,Hasegawa Shuichi¹²^ORCID

Affiliation:

1. Department of Nuclear Engineering and Management, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, Japan

2. Nuclear Professional School, University of Tokyo, 2-22 Shirane, Shirakata, Tokai, Naka, Ibaraki 319-1188, Japan

Abstract

A hollow cathode discharge cell has been developed for a variety of sample phases. To make the experimental apparatus compact, we have adopted DC discharge, and the discharge cell was inexpensively constructed for replacement with commercially available vacuum parts. The most distinctive attribute of the developed cell is the double structure of the cathodes. The occurrence of sputtering resulted in the metal atom in gas phase. With Ar buffer gas, the favorable condition of laser absorption spectroscopy for the gas phase sample was investigated.

Funder

Ministry of Education, Culture, Sports, Science and Technology

Publisher

Hindawi Limited

Subject

Spectroscopy,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Link

http://downloads.hindawi.com/journals/jspec/2019/7491671.pdf

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3. Hollow-cathode discharges-the construction and characteristics of sealed-off tubes for use as spectroscopic light sources