Abstract
Abstract
A hollow cathode discharge with a Ti cathode and a positively biased ring anode was operated in Ar + N$$_2$$
2
or Ar + O$$_2$$
2
gas mixtures. The energy distribution of plasma ions is investigated with the help of energy-resolved mass spectrometry. Singly and doubly charged Ar$$^+$$
+
and Ar$$^{2+}$$
2
+
ions and molecular N$$_2^+$$
2
+
or O$$_2^+$$
2
+
ions are the most abundant ionic species. The kinetic energy of all plasma ions is enhanced by a positive anode voltage.
Graphical abstract
Funder
Grantová Agentura Ceské Republiky
Ministerstvo Práce a Sociálních Vecí Ceské Republiky
Publisher
Springer Science and Business Media LLC
Subject
Atomic and Molecular Physics, and Optics
Cited by
5 articles.
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