Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition
Author:
Affiliation:
1. Wuhan Research Institute of Materials Protection, Wuhan 430030, China
2. State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China
Abstract
Funder
National Natural Science Foundation of China
Publisher
Hindawi Limited
Subject
General Engineering,General Materials Science
Link
http://downloads.hindawi.com/journals/amse/2014/639461.pdf
Reference32 articles.
1. Deposition and characterization of multilayered TiN/ZrN coatings
2. Nanometer scale multilayered hard coatings
3. New Routes in the Preparation of Mechanically Hard Films
4. Structure, hardness and thermal stability of nanolayered TiN/CrN multilayer coatings
5. Mechanical properties and thermal stability of TiN∕TiB2 nanolayered thin films
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