New Routes in the Preparation of Mechanically Hard Films

Author:

Sproul William D.1

Affiliation:

1. The author is with BIRL, Northwestern University, Evanston, IL 60201, USA.

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

Reference22 articles.

1. BARNETT S.A., PHYS THIN FILMS 17, 1 (1993).

2. MODEL OF SUPERLATTICE YIELD STRESS AND HARDNESS ENHANCEMENTS;CHU X;JOURNAL OF APPLIED PHYSICS,1995

3. DEPOSITION AND PROPERTIES OF POLYCRYSTALLINE TIN/NBN SUPERLATTICE COATINGS;CHU X;JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,1992

4. REACTIVE UNBALANCED MAGNETRON SPUTTER DEPOSITION OF POLYCRYSTALLINE TIN/NBN SUPERLATTICE COATINGS;CHU X;SURFACE & COATINGS TECHNOLOGY,1993

5. CHU X, THESIS NW U EVANSTON (1995).

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