Selection of MEMS Accelerometers for Tilt Measurements

Abstract

In order to build a tilt sensor having a desired sensitivity and measuring range, one should select an appropriate type, orientation, and initial position of an accelerometer. Various cases of tilt measurements are considered: determining exclusively pitch, axial tilt, or both pitch and roll, where Cartesian components of the gravity acceleration are measured by means of low-g uni-, bi-, tri-, or multiaxial micromachined accelerometers. 15 different orientations of such accelerometers are distinguished (each illustrated with respective graphics) and related to the relevant mathematical formulas. Results of the performed experimental study revealed inherent misalignments of the sensitive axes of micromachined accelerometers as large as 1°. Some of the proposed orientations make it possible to avoid a necessity of using the most misaligned pairs of the sensitive axes; some increase the accuracy of tilt measurements by activating all the sensitive axes or reducing the effects of anisotropic properties of micromachined triaxial accelerometers; other orientations make it possible to reduce a necessary number of the sensitive axes at full measurement range. An increase of accuracy while using multiaxial accelerometers is discussed. Practical guidelines for an optimal selection of a particular micromachined accelerometer for a specific case of tilt measurement are provided.