OpenCV-Based Nanomanipulation Information Extraction and the Probe Operation in SEM

Abstract

Aimed at the established telenanomanipulation system, the method of extracting location information and the strategies of probe operation were studied in this paper. First, the machine learning algorithm of OpenCV was used to extract location information from SEM images. Thus nanowires and probe in SEM images can be automatically tracked and the region of interest (ROI) can be marked quickly. Then the location of nanowire and probe can be extracted from the ROI. To study the probe operation strategy, the Van der Waals force between probe and a nanowire was computed; thus relevant operating parameters can be obtained. With these operating parameters, the nanowire in 3D virtual environment can be preoperated and an optimal path of the probe can be obtained. The actual probe runs automatically under the telenanomanipulation system's control. Finally, experiments were carried out to verify the above methods, and results show the designed methods have achieved the expected effect.